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Analysis of the diffraction pattern for optimal assist feature placement

✍ Scribed by Amandine Borjon; Jérôme Belledent; Yorick Trouiller; Christian Gardin; Christophe Couderc; Yves Rody; Frank Sundermann; Jean-Christophe Urbani; Franck Foussadier; Jonathan Planchot; Emek Yesilada; Patrick Montgomery; Bill Willkinson; Mazen Saied; Catherine Martinelli; Gurwan Kerrien; Laurent Le Cam; Florent Vautrin; Frédéric Robert; Patrick Schiavone

Publisher: Elsevier Science
Year: 2007
Tongue: English
Weight: 913 KB
Volume: 84
Category: Article
ISSN: 0167-9317
DOI: 10.1016/j.mee.2007.01.016

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