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Analysis of the (100)Si/LaAlO3structure by electron spin resonance: nature of the interface

✍ Scribed by K. Clémer; A. Stesmans; V. V. Afanas’ev; L. F. Edge; D. G. Schlom


Book ID
106397548
Publisher
Springer US
Year
2007
Tongue
English
Weight
208 KB
Volume
18
Category
Article
ISSN
0957-4522

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✍ A. Stesmans; V.V. Afanas’ev 📂 Article 📅 2007 🏛 Elsevier Science 🌐 English ⚖ 190 KB

Electron spin resonance (ESR) spectroscopy enables to assess on atomic scale the nature and structural aspects of interfaces and interlayers in semiconductor/insulator hetero structures. This has been applied to (1 0 0)/insulator entities with nm-thin amorphous layers of HfO 2 and LaAlO 3 of high di