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Analysis of stresses in GaAs single-crystal wafers by X-ray diffraction and photoelasticity methods

✍ Scribed by Zakharov, S. N. ;Laptev, S. A. ;Kaganer, V. M. ;Bublik, V. T. ;Indenbom, V. L.


Publisher
John Wiley and Sons
Year
1992
Tongue
English
Weight
467 KB
Volume
131
Category
Article
ISSN
0031-8965

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