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Analysis of Stress Distribution in Semiconductor Substrates with Film Patterns

✍ Scribed by Dr. A. Fischer; G. Bloch

Publisher: John Wiley and Sons
Year: 1986
Tongue: English
Weight: 307 KB
Volume: 21
Category: Article
ISSN: 0232-1300
DOI: 10.1002/crat.2170210223

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