Calculation of the shear stresses in (111)- and (001) semiconductor substrates with film edges

✍ Scribed by Dr. rer. nat. A. Fischer

• Publisher: John Wiley and Sons
• Year: 1985
• Tongue: English
• Weight: 353 KB
• Volume: 20
• Category: Article
• ISSN: 0232-1300
• DOI: 10.1002/crat.2170200114