Analysis of secondary ion species sputtered from SiC surface during He+ and D+ ion irradiation

✍ Scribed by M. Mohri; S. Kato; S. Shinada; K. Watanabe; T. Yamashina

• Book ID: 107809316
• Publisher: Elsevier Science
• Year: 1980
• Tongue: English
• Weight: 430 KB
• Volume: 93-94
• Category: Article
• ISSN: 0022-3115
• DOI: 10.1016/0022-3115(80)90193-2