Energy analysis of secondary ion species sputtered from silicon carbide surface during deuterium ion irradiation

✍ Scribed by S. Kato; T. Satake; M. Mohri; T. Yamashina

• Publisher: Elsevier Science
• Year: 1981
• Tongue: English
• Weight: 474 KB
• Volume: 103
• Category: Article
• ISSN: 0022-3115
• DOI: 10.1016/0022-3115(82)90622-5