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Analysis of plasma surface modifications by thermal depth profiling and correlation with plasma-surface interactions

✍ Scribed by B.K. Bein; M. Wojczak; J. Pelzl

Book ID: 108025368
Publisher: Elsevier Science
Year: 1989
Tongue: English
Weight: 648 KB
Volume: 122
Category: Article
ISSN: 0921-5093
DOI: 10.1016/0921-5093(89)90778-8

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