Analysis of material modifications caused by nanosecond pulsed UV laser processing of SiC and GaN

✍ Scribed by Olaf Krüger; Tim Wernicke; Joachim Würfl; Roland Hergenröder; Günther Tränkle

• Publisher: Springer
• Year: 2008
• Tongue: English
• Weight: 465 KB
• Volume: 93
• Category: Article
• ISSN: 1432-0630
• DOI: 10.1007/s00339-008-4647-3