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Analysis of film strain and stress in a film-substrate cantilever system

✍ Scribed by Narsu Bai; GuoHong Yun

Book ID
107360263
Publisher
Science in China Press (SCP)
Year
2008
Tongue
English
Weight
692 KB
Volume
51
Category
Article
ISSN
1672-1799

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## Abstract The quantitative study by transmission electron microscopy (TEM) of crystalline defects in ultra‐thin film deposited on a substrate system is often complicated by the elastic interactions between short dislocation segments and the free surface of the film. It is shown, in the frame of i