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Analysis of electromechanical boundary effects on the pull-in of micromachined fixed–fixed beams

✍ Scribed by O Mahony, C; Hill, M; Duane, R; Mathewson, A

Book ID: 120551719
Publisher: Institute of Physics
Year: 2003
Tongue: English
Weight: 498 KB
Volume: 13
Category: Article
ISSN: 0960-1317
DOI: 10.1088/0960-1317/13/4/312

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