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Analysis of average thermal stresses in passivated metal interconnects

✍ Scribed by WikstroÌm, A.; Gudmundson, P.; Suresh, S.

Book ID: 121188738
Publisher: American Institute of Physics
Year: 1999
Tongue: English
Weight: 397 KB
Volume: 86
Category: Article
ISSN: 0021-8979
DOI: 10.1063/1.371658

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