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Analysis of Al2O3 Atomic Layer Deposition on ZrO2 Nanoparticles in a Rotary Reactor

✍ Scribed by J. A. McCormick; K. P. Rice; D. F. Paul; A. W. Weimer; S. M. George

Publisher: John Wiley and Sons
Year: 2007
Tongue: English
Weight: 781 KB
Volume: 13
Category: Article
ISSN: 0948-1907
DOI: 10.1002/cvde.200606563

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