Analysis of a thin, silicon-oxide, silicon-nitride multilayer target by time-of-flight medium energy backscattering

✍ Scribed by Robert A. Weller; Kyle McDonald; Diane Pedersen; Joseph A. Keenan

• Book ID: 113287162
• Publisher: Elsevier Science
• Year: 1996
• Tongue: English
• Weight: 428 KB
• Volume: 118
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/0168-583x(95)01116-1