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Analyses of a cantilever-beam based instrument for evaluating the development of polymerization stresses

โœ Scribed by Martin Y.M. Chiang; Anthony A.M. Giuseppetti; Jing Qian; Joy P. Dunkers; Joseph M. Antonucci; Gary E. Schumacher; Sheng-Lin Gibson

Book ID
113566285
Publisher
Elsevier Science
Year
2011
Tongue
English
Weight
350 KB
Volume
27
Category
Article
ISSN
0109-5641

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## Synopsis .A new method of evaluation of the effect of electron beam on the latent changes in degrading polymer resists has been developed on the base of measurement of the developing curve under an interference microscope. An evaluation procedure using the unit parameters (film thickness and de