The Nitridation of a Silicon Powder Stud
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Sen Wang, Pu; Wittberg, Thomas N.
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Article
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1996
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John Wiley and Sons
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English
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XPS and x-ray-induced AES have been used to study the reaction layers formed on silicon powder samples heated in ultra-high purity nitrogen at temperatures between 1100 and 1200 "C. An equation was derived to calculate the average surface reaction layer thicknesses from the silicon AES spectra. The