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An XPS study of photoresist surfaces in SF6O2 r.f. plasmas

✍ Scribed by J.F. Coulon; G. Turban

Publisher: Elsevier Science
Year: 1991
Tongue: English
Weight: 730 KB
Volume: 139
Category: Article
ISSN: 0921-5093
DOI: 10.1016/0921-5093(91)90647-6

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