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XPS study of the O2/SF6 microwave plasma oxidation of (0 0 1) GaAs surfaces

✍ Scribed by G. Monier; L. Bideux; O. Desplats; C. Fontaine; C. Robert-Goumet; B. Gruzza

No coin nor oath required. For personal study only.

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XPS study of the O2/SF6 microwave plasma oxidation of (0&#xa0;0&#xa0;1) GaAs surfaces