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An UV linear variable optical filter-based micro-spectrometer

โœ Scribed by Arvin Emadi; H. Wu; G. de Graaf; K. Hedsten; P. Enoksson; J.H. Correia; R.F. Wolffenbuttel

Book ID
108255756
Publisher
Elsevier
Year
2010
Tongue
English
Weight
840 KB
Volume
5
Category
Article
ISSN
1877-7058

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Fabrication and characterization of IC-Compatible Linear Variable Optical Filters with application in a micro-spectrometer
โœ A. Emadi; H. Wu; S. Grabarnik; G. De Graaf; K. Hedsten; P. Enoksson; J.H. Correi ๐Ÿ“‚ Article ๐Ÿ“… 2010 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 748 KB

This paper reports on an IC-Compatible process for the fabrication of Linear Variable Optical Filter (LVOF). The LVOF is integrated with a detector array to result in a micro-spectrometer. The technological challenge in fabrication of an LVOF is fabrication of a well-controlled tapered cavity layer.