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An overview of diagnostic methods of low-pressure capacitively coupled plasmas

✍ Scribed by Yong-Xin Liu; Wei Jiang; Xiao-Song Li; Wen-Qi Lu; You-Nian Wang

Book ID: 118501876
Publisher: Elsevier Science
Year: 2012
Tongue: English
Weight: 409 KB
Volume: 521
Category: Article
ISSN: 0040-6090
DOI: 10.1016/j.tsf.2012.02.016

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