An optimized and reliable LDD structure for 1-µm NMOSFET based on substrate current analysis

✍ Scribed by Matsumoto, Y.; Higuchi, T.; Mizuno, T.; Sawada, S.; Shinozaki, S.; Ozawa, O.

• Book ID: 114595075
• Publisher: IEEE
• Year: 1985
• Tongue: English
• Weight: 441 KB
• Volume: 32
• Category: Article
• ISSN: 0018-9383
• DOI: 10.1109/t-ed.1985.21959