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An ion source with plasma generator

✍ Scribed by E. Yabe; S. Takeshiro; K. Sunako; K. Takayama; R. Fukui; K. Takagi; K. Okamoto; S. Komiya

Book ID: 113277321
Publisher: Elsevier Science
Year: 1985
Tongue: English
Weight: 391 KB
Volume: 6
Category: Article
ISSN: 0168-583X
DOI: 10.1016/0168-583x(85)90620-2

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