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An ion beam system for ion scattering, bombardment induced light emission and secondary ion mass spectrometry

โœ Scribed by DG Armour; JJ Jimenez-Rodriguez; CH Barber; K Snowdon; P Hedbavny

Publisher
Elsevier Science
Year
1984
Tongue
English
Weight
396 KB
Volume
34
Category
Article
ISSN
0042-207X

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A New Focused Ion Beam Optical System fo
A New Focused Ion Beam Optical System for a Time-of-flight-Secondary Ion Mass Spectrometry Instrument
โœ H. Shichi; S. Osabe; K. Kanehori ๐Ÿ“‚ Article ๐Ÿ“… 1997 ๐Ÿ› John Wiley and Sons ๐ŸŒ English โš– 157 KB ๐Ÿ‘ 2 views

A new focused ion beam optical system that uses a liquid metal ion source was designed for a new secondary ion time-of-flight mass spectrometry instrument. This optical system consists mainly of two electrostatic lenses. The axial performance of the system was calculated to decide the design values