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An Ion-Beam Apparatus for the Surface Planarization of Oxide Materials

✍ Scribed by A. I. Stognij; N. N. Novitskii

Book ID: 110330174
Publisher: Springer
Year: 2002
Tongue: English
Weight: 340 KB
Volume: 45
Category: Article
ISSN: 0020-4412
DOI: 10.1023/a:1014589301940

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