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An investigation of the properties of silicon oxide prepared by oxidation of silicon in chlorine-containing ambients at 850°C

✍ Scribed by Hai Lu; Jianhong Liu; Wei Li; Kunji Chen; Xinfan Huang

Book ID: 117358645
Publisher: Elsevier Science
Year: 1999
Tongue: English
Weight: 122 KB
Volume: 38
Category: Article
ISSN: 0167-577X
DOI: 10.1016/s0167-577x(98)00180-3

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