An investigation of RF sputter etched silicon surfaces using helium ion backscatter : G. W. Sachse, W. E. Miller and C. Gross. Solid-St. Electron. 18, 431 (1975)

• Publisher: Elsevier Science
• Year: 1975
• Tongue: English
• Weight: 127 KB
• Volume: 14
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/0026-2714(75)90263-2