An investigation into the effects of plasma bombardment anisotropy in low frequency r.f. glow discharges

✍ Scribed by A.S. James; K.S. Fancey; A. Matthews

• Publisher: Elsevier Science
• Year: 1991
• Tongue: English
• Weight: 409 KB
• Volume: 140
• Category: Article
• ISSN: 0921-5093
• DOI: 10.1016/0921-5093(91)90472-y