An intrinsic stress scaling law for polycrystalline thin films prepared by ion beam sputtering

✍ Scribed by Windischmann, H.

• Book ID: 120929767
• Publisher: American Institute of Physics
• Year: 1987
• Tongue: English
• Weight: 867 KB
• Volume: 62
• Category: Article
• ISSN: 0021-8979
• DOI: 10.1063/1.339560