Intrinsic stress in AIN prepared by dual-ion-beam sputtering: H Windischmann, Thin Solid Films, 154, 1987, 159–170

• Publisher: Elsevier Science
• Year: 1989
• Tongue: English
• Weight: 154 KB
• Volume: 39
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(89)90375-8