An integrated debugging system based on E-beam test

✍ Scribed by Isabelle Guiguet; Meryem Marzouki; Bernard Courtois

• Publisher: Elsevier Science
• Year: 1987
• Tongue: English
• Weight: 583 KB
• Volume: 7
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/s0167-9317(87)80022-9

✦ Synopsis

A data processing system, as part of a whole integrated test system for debugging VLSI circuits using a scanning electron microscope is described here. A link between a CALMA description and the S.EM. images of a circuit is particularly reporteck This forms the basis of an expert system for fault diagnosis. * Determim'ng rite nodes smm¢, by interpreting the "grey levels" image. This interpretation provides the actual logical values of the observation nodes, which are compared against the simulation values in order to deduce the nodes status: erroneous or not. * Par~'ionMng the circuit structure: since the circuit is well known it is possible to deduce its structure and to operate a partitioning at any required level. So, a bloc diagram of the circuit is obtained. This partitionning can also be used for simulation. * The work reported hereafter is partly supported by an European collaboration among BTRL (U.IC), C.NET (France), CSELT (Italy), IMAG (France) and Trinity College Dublin (Ireland) aimed at fully automating the electron beam testing IaXX:edure for design validation of VLSI ~tafits