An insulator-lined silicon substrate-via technology with high aspect ratio

✍ Scribed by Wu, J.H.; Scholvin, J.; Del Alamo, J.A.

• Book ID: 114538850
• Publisher: IEEE
• Year: 2001
• Tongue: English
• Weight: 66 KB
• Volume: 48
• Category: Article
• ISSN: 0018-9383
• DOI: 10.1109/16.944215