𝔖 Bobbio Scriptorium
✦   LIBER   ✦

An in situ growth method for property control of LPCVD polysilicon film

✍ Scribed by Hongbin Yu; Haiqinq Chen; Jun Li; Chao Wang

Book ID
115367040
Publisher
Optics InfoBase
Year
2004
Tongue
English
Weight
620 KB
Volume
2
Category
Article
ISSN
1671-7694

No coin nor oath required. For personal study only.

πŸ“œ SIMILAR VOLUMES

In-Situ Optical Pyrometry in the CVD of
In-Situ Optical Pyrometry in the CVD of Metallic Thin Films for Real Time Control of the Growth
✍ C. Gasqueres; F. Maury; F. Ossola πŸ“‚ Article πŸ“… 2003 πŸ› John Wiley and Sons 🌐 English βš– 273 KB πŸ‘ 1 views

## Abstract In‐situ temperature measurement is essential in CVD in order to control the temperature of the growing films. This is frequently achieved by optical pyrometry because it is a sensitive, convenient, and inexpensive technique that can be used in corrosive atmospheres. In this work, in‐sit