An ESD kinetic energy distribution study of trimethylsilane adsorbed on Si(100)

✍ Scribed by M.V. Ascherl; J.H. Campbell; J.H. Craig Jr.

• Publisher: Elsevier Science
• Year: 1994
• Tongue: English
• Weight: 421 KB
• Volume: 74
• Category: Article
• ISSN: 0169-4332
• DOI: 10.1016/0169-4332(94)90107-4