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An electron beam lithography and digital image acquisition system for scanning electron microscopes

โœ Scribed by S. RUSSEV; G. TSUTSUMANOVA; S. ANGELOV; K. BACHEV

Book ID
108864335
Publisher
John Wiley and Sons
Year
2007
Tongue
English
Weight
335 KB
Volume
226
Category
Article
ISSN
0022-2720

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## Abstract A new image detection system has been developed to display transmission electron microscope (TEM) images on a CRT without a video camera system. Deflection coils placed in both the upper space of an objective lens and in the lower space of the first intermediate lens scan a small electr