An efficient screening method for DRAM memory cell capacitor dielectric

✍ Scribed by Kiyohiro Furutani; Makoto Suwa; Kazutami Arimoto; Koichiro Mashiko; Michihiro Yamada; Masatoshi Matsumoto

• Book ID: 112078488
• Publisher: John Wiley and Sons
• Year: 1990
• Tongue: English
• Weight: 631 KB
• Volume: 73
• Category: Article
• ISSN: 8756-663X
• DOI: 10.1002/ecjb.4420731109