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An effective system for parameter optimization in photolithography process of a LGP stamper

✍ Scribed by Wen-Chin Chen, Xiao-Yun Jiang, Hui-Pin Chang…

Book ID
120913396
Publisher
Springer-Verlag
Year
2013
Tongue
English
Weight
376 KB
Volume
24
Category
Article
ISSN
0941-0643

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