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An asymmetry of conduction mechanisms and charge trapping in thin high-k Hf[sub x]Ti[sub y]Si[sub z]O films

✍ Scribed by Paskaleva, A.; Bauer, A. J.; Lemberger, M.

Book ID: 121493741
Publisher: American Institute of Physics
Year: 2005
Tongue: English
Weight: 287 KB
Volume: 98
Category: Article
ISSN: 0021-8979
DOI: 10.1063/1.2039270

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