๐”– Bobbio Scriptorium
โœฆ   LIBER   โœฆ

An architectural design support environment for high-performance digital systems

โœ Scribed by Stefano Antoniazzi; Mirella Mastretti


Publisher
Elsevier Science
Year
1991
Weight
868 KB
Volume
32
Category
Article
ISSN
0165-6074

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We report on the design of an excimer-laser based system for high precision micromachining of spinnerets using a mask imaging technique. Both the illumination and imaging unit are optimized for specified demagnification ratios of 5 and 15, respectively. Detailed investigations were performed to meas