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An approach for fabricating high-performance inductors on low-resistivity substrates

✍ Scribed by Ya-Hong Xie; Frei, M.R.; Becker, A.J.; King, C.A.; Kossives, D.; Gomez, L.T.; Theiss, S.K.

Book ID
119775138
Publisher
IEEE
Year
1998
Tongue
English
Weight
195 KB
Volume
33
Category
Article
ISSN
0018-9200

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## Abstract Monopoles of 1‐mm axial length are designed and fabricated on silicon substrates of high‐resistivity 5 kΩ‐cm and low‐resistivity 10 Ω‐cm, respectively. We measure their performance up to 110 GHz for wireless interconnects for the first time. The reflection measurements show that a sharp