An apparatus for four-probe specific resistance measurement on epitaxial silicon films

✍ Scribed by V. V. Batavin; V. S. Pantuev; V. I. Prilipko

• Book ID: 112414304
• Publisher: Springer US
• Year: 1974
• Tongue: English
• Weight: 164 KB
• Volume: 17
• Category: Article
• ISSN: 0543-1972
• DOI: 10.1007/bf00814387