Specific contact resistance extraction from four-point-probe measurements on multilayered film structures

✍ Scribed by Quat T. Vu; E. Kolawa; L. Halperin; M.-A. Nicolet

• Publisher: Elsevier Science
• Year: 1991
• Tongue: English
• Weight: 429 KB
• Volume: 34
• Category: Article
• ISSN: 0038-1101
• DOI: 10.1016/0038-1101(91)90185-2