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An annealing study of luminescent amorphous silicon-rich silicon oxynitride thin films

✍ Scribed by Augustine, B. H.; Hu, Y. Z.; Irene, E. A.; McNeil, L. E.


Book ID
120377891
Publisher
American Institute of Physics
Year
1995
Tongue
English
Weight
389 KB
Volume
67
Category
Article
ISSN
0003-6951

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