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An analytical solution for mechanical etching of glass by powder blasting

โœ Scribed by J.H.M. ten Thije Boonkkamp; J.K.M. Jansen

Book ID
110395020
Publisher
Springer
Year
2002
Tongue
English
Weight
174 KB
Volume
43
Category
Article
ISSN
0022-0833

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๐Ÿ“œ SIMILAR VOLUMES

Atomistic mechanism for the macroscopic
Atomistic mechanism for the macroscopic effects induced by small additions of surfactants to alkaline etching solutions
โœ M.A. Gosรกlvez; P. Pal; B. Tang; K. Sato ๐Ÿ“‚ Article ๐Ÿ“… 2010 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 1018 KB

This letter proposes a model to explain the accused macroscopic effects caused by a small addition of a surfactant, such as Triton X-100, to a typical alkaline etchant, such as tetramethyl ammonium hydroxide (TMAH), for applications of silicon micromachining in Micro Electro Mechanical Systems (MEMS