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An analysis of macroparticle-related defects on CrCN and CrN coatings in dependence of the substrate bias voltage

✍ Scribed by B. Warcholinski; A. Gilewicz; J. Ratajski; Z. Kuklinski; J. Rochowicz

Book ID: 113940804
Publisher: Elsevier Science
Year: 2012
Tongue: English
Weight: 733 KB
Volume: 86
Category: Article
ISSN: 0042-207X
DOI: 10.1016/j.vacuum.2011.04.023

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