𝔖 Bobbio Scriptorium
✦   LIBER   ✦

AN ANALYSIS OF A SEMICONDUCTOR EXPERIMENT USING YIELD AND SPATIAL INFORMATION

✍ Scribed by José G. Ramírez; Brenda Cantell

Publisher
John Wiley and Sons
Year
1997
Tongue
English
Weight
191 KB
Volume
13
Category
Article
ISSN
0748-8017

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✦ Synopsis

Semiconductor yield data is binary by nature since an integrated circuit (IC), or die, can only pass or fail a particular test. Still, many people rely on simple linear regression to analyse this type of data, which can produce incorrect results, e.g. negative yield predictions. We discuss the use of logistic regression for the analysis of yield data, and show that even this approach has to be modified to take into account the phenomenon of overdispersion. We present several approaches to accommodate overdispersion. We also discuss a statistic for measuring the spatial dependence of ICs within a wafer, the spatial log-odds ratio, which provides additional information to complement a yield analysis. These ideas are demonstrated using an example from our manufacturing area.

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