An amperometric microsensor array with 1
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T. Hermes; M. Bühner; S. Bücher; C. Sundermeier; C. Dumschat; M. Borchardt; K. C
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Article
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1994
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Elsevier Science
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English
⚖ 616 KB
A microsensor array with 32 rows and 32 columns of 1024 individual addressable amperometric cells on a 30 mm X30 mm Si substrate has been developed. The performance of the two-dimensional measuring system is described with an example of a Clark-type oxygen-measurement system, leading to a novel near