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An algorithm to calculate secondary sputtering by the reflection of ions in two dimensions

✍ Scribed by R. Smith; M.A. Tagg

Publisher: Elsevier Science
Year: 1986
Tongue: English
Weight: 450 KB
Volume: 36
Category: Article
ISSN: 0042-207X
DOI: 10.1016/0042-207x(86)90608-1

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