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An AES Evaluation of Cleaning and Etching Methods for InSb

โœ Scribed by Auret, F. D.

Book ID
125532123
Publisher
The Electrochemical Society
Year
1982
Tongue
English
Weight
432 KB
Volume
129
Category
Article
ISSN
0013-4651

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## Abstract In this work, an improved approach was developed for the construction of a hydrofluoric acid etched capillary porous joint, and the pore size of the porous joint was investigated. Several etching factors such as reagents concentration and etching temperature were optimized. Results show