✦ LIBER ✦

Amorphous silicon carbide and its application in silicon micromachining

✍ Scribed by A. Klumpp; U. Schaber; H.L. Offereins; K. Kühl; H. Sandmaier

Publisher: Elsevier Science
Year: 1994
Tongue: English
Weight: 639 KB
Volume: 41
Category: Article
ISSN: 0924-4247
DOI: 10.1016/0924-4247(94)80129-0

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