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Amorphous Mo–N and Mo–Si–N films in microelectromechanical systems

✍ Scribed by H. KATTELUS; M. YLÖNEN; M. BLOMBERG

Book ID: 109014075
Publisher: John Wiley and Sons
Year: 2005
Tongue: English
Weight: 206 KB
Volume: 28
Category: Article
ISSN: 8756-758X
DOI: 10.1111/j.1460-2695.2005.00887.x

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